真空机组技术参数
| 型 号 | 极限压力Pa | 抽速L/s | 主泵加热功率kW | 主机型号 | 配用的挡板 | 配用的高真空阀(气、电动阀) | 配用的前级泵 | 进气口直径D | D1 | N-Φ1 | 中心高尺寸 | ||
| JK-200T |
5x10-4
|
600 | 1.8 | K-200T | SB-200 | GF-200 | GDD-J200 | GDQ-J200 | 2X-15 | 200 | 250 | 8-Φ12 | 940 |
| JK-300T | 1400 | 3 | K-300T | SB-300 | GF-300 | GDD-J300 | GDQ-J300 | 2X-30 | 300 | 350 | 8-Φ14 | 1160 | |
| JK-320TD | 1500 | 4 | K-320TD | 内藏式 | GDD-J320 | GDQ-J320 | 2X-30 | 320 | 395 | 12-Φ14 | 1340 | ||
| JK-400T | 2600 | 4.5 | K-400T | SB-400 | GDD-J400 | GDQ-J400 | 2X-70 | 400 | 465 | 8-Φ18 | 1500 | ||
| JK-500TD | 3800 | 6.9 | K-500TD | 内藏式 | GDD-J500 | GDQ-J500 | 2X-70 | 500 | 580 | 16-Φ14 | 1700 | ||
| JK-600T | 5600 | 8.4 | K-600T | SB-600 | GDD-J600 | GDQ-J600 | 2X-70 | 600 | 670 | 12-Φ21 | 2030 | ||
| JK-800 | 7560 | 8.4 | K-800 | SB-800 | GDQ-J800 | 2X-70 2台 | 800 | 880 | 20-Φ21 | 2280 | |||
| JK-800TD | 8600 | 15 | K-800TD | 内藏式 | GDQ-J800 | H-150(2台) | 800 | 880 | 20-Φ21 | 2414 | |||
| JK-1000TD | 13000 | 24 | K-1000TD | 内藏式 | GDQ-J1000 | H-150(2台) | 1000 | 1090 | 24-Φ23 | 2915 | |||
| JK-1200 | 16000 | 24 | K-1200 | SB-1200 | GDQ-J1200 | H-150 2台 | 1200 | 1310 | 28-Φ25 | 3582 | |||
扩散泵机组装配图
|
型号尺寸 |
JK-200T |
JK-300T |
JK-400T |
JK-500T |
JK-600T |
JK-800T |
JK-1000T |
JK-1200T |
|
C |
1425 |
1810 |
2270 |
2450 |
3277 |
3941 |
4930 |
5726 |
|
D |
φ250 |
φ350 |
φ465 |
φ565 |
φ670 |
|
φ1090 |
φ1310 |
|
H |
885 |
1140 |
1430 |
1425 |
φ21 |
2500 |
2950 |
3598 |
|
d |
φ12 |
φ14 |
φ18 |
φ18 |
2050 |
φ21 |
φ23 |
φ25 |
|
n |
8 |
8 |
8 |
12 |
12 |
20 |
24 |
28 |
鲁公网安备 37030202000927号